电子增强化学气相沉积法制备金刚石膜

顾长志 王春蕾 金曾孙 吕宪义 邹广田

顾长志, 王春蕾, 金曾孙, 吕宪义, 邹广田. 电子增强化学气相沉积法制备金刚石膜[J]. 高压物理学报, 1994, 8(3): 220-223 . doi: 10.11858/gywlxb.1994.03.010
引用本文: 顾长志, 王春蕾, 金曾孙, 吕宪义, 邹广田. 电子增强化学气相沉积法制备金刚石膜[J]. 高压物理学报, 1994, 8(3): 220-223 . doi: 10.11858/gywlxb.1994.03.010
GU Chang-Zhi, WANG Chun-Lei, JIN Zeng-Sun, Lü Xian-Yi, ZOU Guang-Tian. The Preparation of Diamond Film with the Method of Electron Assisted Chemical Vapor Deposition[J]. Chinese Journal of High Pressure Physics, 1994, 8(3): 220-223 . doi: 10.11858/gywlxb.1994.03.010
Citation: GU Chang-Zhi, WANG Chun-Lei, JIN Zeng-Sun, Lü Xian-Yi, ZOU Guang-Tian. The Preparation of Diamond Film with the Method of Electron Assisted Chemical Vapor Deposition[J]. Chinese Journal of High Pressure Physics, 1994, 8(3): 220-223 . doi: 10.11858/gywlxb.1994.03.010

电子增强化学气相沉积法制备金刚石膜

doi: 10.11858/gywlxb.1994.03.010
详细信息
    通讯作者:

    顾长志

The Preparation of Diamond Film with the Method of Electron Assisted Chemical Vapor Deposition

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    Corresponding author: GU Chang-Zhi
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出版历程
  • 收稿日期:  1993-09-04
  • 修回日期:  1993-10-16
  • 发布日期:  1994-09-05

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