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Abstract: In this paper, morphologies of polycrystalline diamond film and epitaxial single-crystal diamond film by microwave plasma CVD method were reported, the causes of these morphologies were analyzed.
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Key words:
- Diamond film /
- microwave plasma CVD /
- morphology
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Messier R, Spear K E, Badzian A R, et al. J Metals, 1987, 39: 8. 闻立时, 等. 薄膜科学与技术, 1990, 3(3): 72. Tsuda M, Nakajima M, Oikawa S. ISPC-8. Tokyo PS7-02, 1987. Spear K E. J Am Ceram Soc, 1989, 72(2): 91.
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