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Chinese Journal of High Pressure Physics  > 2004  >  18(3): 279-282 .
TENG Lin, YANG Bang-Chao, DU Xiao-Song, ZHOU Hong-Ren, CUI Hong-Ling. Dynamic Piezoresistance Response of Array MnCu Film Gauges[J]. Chinese Journal of High Pressure Physics, 2004, 18(3): 279-282 . doi: 10.11858/gywlxb.2004.03.014
Citation: TENG Lin, YANG Bang-Chao, DU Xiao-Song, ZHOU Hong-Ren, CUI Hong-Ling. Dynamic Piezoresistance Response of Array MnCu Film Gauges[J]. Chinese Journal of High Pressure Physics, 2004, 18(3): 279-282 . doi: 10.11858/gywlxb.2004.03.014
shu

Dynamic Piezoresistance Response of Array MnCu Film Gauges

doi: 10.11858/gywlxb.2004.03.014

  • College of Microelectronics and Solid-State Electronics, UESTC, Chengdu 610054, China

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  • Corresponding author: TENG Lin
  • Received Date: 15 Sep 2003
  • Rev Recd Date: 22 Dec 2003
  • Issue Publish Date: 05 Sep 2004
    Abstract
  • Array MnCu film piezoresistance gauges were fabricated by D.C. magnetism sputtering with 99% Al2O3 taken as substrate and insulator. Four MnCu gauges with the same resistance were deposited on one Al2O3 substrate symmetrically. Through dynamic loading experiments at the pressure of 51.72 GPa, it is indicated that four piezoresistance gauges have good consistency, and keep insulating trait under high pressure, which verifies the reliability of dynamic testing of MnCu film piezoresistance gauges.

     

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