Effect of Filament Temperature on in Situ Absorption Spectrum and Diamond Film Growth
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摘要: 报道了原位红外吸收光谱在气相合成金刚石薄膜生长过程中的应用，研究了灯丝温度对原位红外吸收光谱和金刚石薄膜生长的影响。较高的灯丝温度使甲烷分解更充分，从而产生更多诸如C2H2等可能对金刚石薄膜生长有利的基团，导致金刚石薄膜质量和生长速率的提高。Abstract: In situ infrared absorption spectroscopy has been used to study chemical vapor deposition (CVD) diamond growth process. The effects of filament temperature on in situ infrared absorption and diamond film growth are investigated. We find that the absorption of CH4 radicals is always exist while that of C2H2 can only be detected at filament temperatures higher than a threshold value, 1 700 ℃. High filament temperature results in more C2H2 formation and CH4 decomposition. At the same time, diamond films prepared at high filament temperature will have a higher diamond content and growth rate. We conclude that more decomposition in CH4 will lead to high concentration C2H2 and hydrocarbon formation radicals which may benefit the high quality diamond film growth and promote growth rate.
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Key words:
- absorption spectrum /
- in situ detection /
- diamond film /
- temperature
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