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SHI Shang-Chun, DONG Shi, HUANG Yue, ZHOU Hong-Ren. Crystallization of Plating-Manganin Piezoresistance Gauges[J]. Chinese Journal of High Pressure Physics, 2001, 15(4): 254-258 . doi: 10.11858/gywlxb.2001.04.003
Citation: SHI Shang-Chun, DONG Shi, HUANG Yue, ZHOU Hong-Ren. Crystallization of Plating-Manganin Piezoresistance Gauges[J]. Chinese Journal of High Pressure Physics, 2001, 15(4): 254-258 . doi: 10.11858/gywlxb.2001.04.003

Crystallization of Plating-Manganin Piezoresistance Gauges

doi: 10.11858/gywlxb.2001.04.003
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  • Corresponding author: SHI Shang-Chun
  • Received Date: 29 Dec 2000
  • Rev Recd Date: 17 May 2001
  • Publish Date: 05 Dec 2001
  • Magnetically controlled cathod plasma sputtering technique was used to manufacture the plating-manganin film. Although the film was the same metal-construction feature as manganin-alloy does, it has smaller crystalloid-size, twice resistivity and less piezoresistance coefficient than the alloy. However, the average crystal size increases by about 20%, and the resistivity decreases by 50%. The piezoresistance coefficient of the film annealed under 673 K in vacuum increased to 2.0~2.6 (10-2 GPa-1) in 0~80 GPa.

     

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    施尚春, 张清福, 罗教明, 等. 镀膜锰铜计的压阻性能研究[J]. 高压物理学报, 1992, 6(1) : 68-74.
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