The Mechanism of the Negative Bias-Enhanced Nucleation of Diamond

The mechanism of substrates negative bias-enhanced nucleation of diamond, in the growth of diamond thin films by plasma CVD methods is suggested. A relationship between the effect of bias-enhanced nucleation and deposition condition such as the reaction pressures and carbon fractions are obtained from the model. The model reasonably explains why the bias-enhanced nucleation of diamond increase with the decrease of reaction pressures and the increase of carbon fraction, as the bias is enhanced. The model is also in accordance with the reported data.