Analysis of the Morphologies of Diamond Film Grown by Microwave Plasma CVD Method

FANG Li-Li; ZHANG Zhan; LI Jia; MA Li-Ying; ZHAO Hao-Min; YU Hong-Chang; WU Bao-Shan

doi:10.11858/gywlxb.1991.03.007

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Chinese Journal of High Pressure Physics > 1991 > 5(3): 197-204 .

FANG Li-Li, ZHANG Zhan, LI Jia, MA Li-Ying, ZHAO Hao-Min, YU Hong-Chang, WU Bao-Shan. Analysis of the Morphologies of Diamond Film Grown by Microwave Plasma CVD Method[J]. Chinese Journal of High Pressure Physics, 1991, 5(3): 197-204 . doi: 10.11858/gywlxb.1991.03.007

Citation:

FANG Li-Li, ZHANG Zhan, LI Jia, MA Li-Ying, ZHAO Hao-Min, YU Hong-Chang, WU Bao-Shan. Analysis of the Morphologies of Diamond Film Grown by Microwave Plasma CVD Method[J]. Chinese Journal of High Pressure Physics, 1991, 5(3): 197-204 . doi: 10.11858/gywlxb.1991.03.007

Citation:

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Analysis of the Morphologies of Diamond Film Grown by Microwave Plasma CVD Method

doi: 10.11858/gywlxb.1991.03.007

1.
Zhengzhou Research Institute for Abrasives & Grinding, Ministry of Machinery & Electronics Industry, Zhengzhou 450007, China;
2.
Lanzhou University, Lanzhou 730000, China

More Information

Corresponding author: FANG Li-Li
Received Date: 02 Feb 1991
Rev Recd Date: 03 Jul 1991
Publish Date: 05 Sep 1991

Abstract

Abstract

In this paper, morphologies of polycrystalline diamond film and epitaxial single-crystal diamond film by microwave plasma CVD method were reported, the causes of these morphologies were analyzed.
- Diamond film,
- microwave plasma CVD,
- morphology