金刚石厚膜的微结构研究

姜志刚 冯玉玲 郑涛 李红东 李博 郑艳彬 林志伟

姜志刚, 冯玉玲, 郑涛, 李红东, 李博, 郑艳彬, 林志伟. 金刚石厚膜的微结构研究[J]. 高压物理学报, 2008, 22(3): 265-268 . doi: 10.11858/gywlxb.2008.03.007
引用本文: 姜志刚, 冯玉玲, 郑涛, 李红东, 李博, 郑艳彬, 林志伟. 金刚石厚膜的微结构研究[J]. 高压物理学报, 2008, 22(3): 265-268 . doi: 10.11858/gywlxb.2008.03.007
JIANG Zhi-Gang, FENG Yu-Ling, ZHENG Tao, LI Hong-Dong, LI Bo, ZHENG Yan-Bin, LIN Zhi-Wei. Investigation on Grain Boundaries and Related Abradability of Diamond Thick Films[J]. Chinese Journal of High Pressure Physics, 2008, 22(3): 265-268 . doi: 10.11858/gywlxb.2008.03.007
Citation: JIANG Zhi-Gang, FENG Yu-Ling, ZHENG Tao, LI Hong-Dong, LI Bo, ZHENG Yan-Bin, LIN Zhi-Wei. Investigation on Grain Boundaries and Related Abradability of Diamond Thick Films[J]. Chinese Journal of High Pressure Physics, 2008, 22(3): 265-268 . doi: 10.11858/gywlxb.2008.03.007

金刚石厚膜的微结构研究

doi: 10.11858/gywlxb.2008.03.007
详细信息
    通讯作者:

    姜志刚

Investigation on Grain Boundaries and Related Abradability of Diamond Thick Films

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    Corresponding author: JIANG Zhi-Gang
  • 摘要: 采用直流辉光等离子体化学气相沉积金刚石厚膜,利用氢的微波等离子体对抛光的金刚石厚膜截面进行刻蚀,用扫描电子显微镜、激光拉曼光谱仪研究了金刚石厚膜的微结构及杂质、缺陷的分布。结果表明:杂质、空洞主要富集在晶界处;在金刚石膜的生长过程中,随着甲烷流量的增加,晶界密度、空洞、晶粒内部缺陷、杂质含量逐渐增加,晶界的排列从以纵向为主过渡到网状结构。

     

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出版历程
  • 收稿日期:  2007-07-09
  • 修回日期:  2007-10-17
  • 发布日期:  2008-09-05

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