用气相沉积方法在低气压下制备BN的高压相：E-BN、c-BN、w-BN

The Synthesis of High-Pressure Phase of BN: E-BN, w-BN, c-BN by Physical Vapor Deposition Method

1.
National Laboratory of Superhard Materials, Jilin University, Changchun 130023, China;
2.
Key Laboratory of Supermolecular Structure and Spectroscopy, Jilin University, Changchun 130023, China

摘要: 用射频磁控溅射方法得到了低应力立方氮化硼薄膜。红外光谱结果表明，薄膜具有很好的附着力，且含有少量的E-BN和w-BN。电子衍射谱表明薄膜表层是纯立方相。同时利用此方法得到了E-BN薄膜。认为在薄膜生长过程中可能经历了一个从E-BN到c-BN的相转变过程。
- E-BN /
- c-BN薄膜 /
- 相变 /
- 高压相材料
Abstract: In this paper we report that we have obtained the E-BN film that was named after the method by which it was obtained (E=Explosion). During the BN films deposition, we suggest a model of phase transition from E-BN to c-BN. We can explain the c-BN nucleation during the deposition by this model. The film we obtained has very good adhesion due to the phase transition.
- E-BN film /
- c-BN /
- phase transition /
- high-pressure phase materials