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摘要: 应用界面能量理论,研究了非金刚石衬底低压气相生长金刚石薄膜中的过渡层问题。提出了过渡层存在的理论机制,较好地解释了一些关于过渡层研究的实验现象。Abstract: The intermediate layers between diamond films and non-diamond substrates. in diamond film system grown with low pressure vapor phase methods, have been studied by interface energy theory. We have put forward the theoretical mechanism of the existence of intermediate layers, and explained some experiment results of intermediate layers.
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Key words:
- substrate /
- interfacc /
- intermedjate layer /
- nucleation
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