-
摘要: 用磁控阴极等离子体溅射技术在云母基底上制作镀膜锰铜压阻计。5~56 GPa冲击应力的标定实验表明，该计的压阻性能稳定。压阻系数的拟合式为p(GPa)=-0.14+90.63(R/R0)+10.81(R/R0)2-7.64(R/R0)3，式中R0为锰铜计初始电阻，R为受压时的电阻变化值。Abstract: The magnetically controlled cathode plasma sputtering technique has been successfully used to manufacture a plating-type manganin piezoresistance gauge on a mica matrix plate. Calibration experiments under pressures 5 to 6 GPa show that the piezoresistance behavior is well-reproduceable. The pressure-piezoresistance fit of the gauge can be written as p(GPa)=-0.14+90.63(R/R0)+10.81(R/R0)2-7.64(R/R0)3, here, R0 is the initial resistance of the gauges, R the resistance increment under shock loading.
-
Key words:
- plating manganin gauge /
- shock pressure /
- piezoresistance coefficient
-
Rosenberg Z. J Phys D, 1987, 20: 1082-1084. Rosenberg Z. J Appl Phys, 1986, 60(9): 3369-3371. Rosenberg Z, Yaziv D. J Appl Phys, 1987, 62(3): 1120-1122. Vantine H, et al. Rev Sci Instrum, 1980, 51(1): 116-122. Bosca G, et al. Rev Phys Appl, 1981, 16: 387-395. 施尚春, 等. 高压物理学报, 1991, 5(3): 205-214. -
点击查看大图
计量
- 文章访问数: 8616
- HTML全文浏览量: 1838
- PDF下载量: 672
下载:
