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摘要: 本文首次把压力引入固态反应非晶化过程，报道了Ni50Ti50多层膜在不同压力下低温退火后的X射线衍射结果。根据压力对反应热力学及动力学过程可能产生的影响，作者对所得结果作出分析，认为在2 GPa以上压力下，反应未能进行的原因是高压抑制了原子的低温快速扩散。提出在Ni-Ti系固态反应非晶化中，受抑制的扩散过程符合薄膜扩散的B类动力学模型。Abstract: The X-ray diffraction of the Ni50Ti50 multilayer samples annealed at low temperature and under various pressures is reported in this paper, in which the effect of pressure on the solid state amorphous reaction is considered for the first time. Based on the effects of pressure on the reaction thermodynamics and kinetics, the authors suggest that the failure of the reaction under the pressure above 2 GPa could be attributed to the high pressure suppression of the fast atomic diffusion. It is also proposed that the suppressed diffusion in the amorphization of the Ni-Ti series solid state reaction could be described by the B type kinetical model for thin film diffusion.
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Key words:
- solid state reaction /
- amorphous phase /
- diffusion in thin films
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