基于原子力显微镜的压痕技术及其应用

王晓萌 高扬

王晓萌, 高扬. 基于原子力显微镜的压痕技术及其应用[J]. 高压物理学报, 2023, 37(6): 060103. doi: 10.11858/gywlxb.20230694
引用本文: 王晓萌, 高扬. 基于原子力显微镜的压痕技术及其应用[J]. 高压物理学报, 2023, 37(6): 060103. doi: 10.11858/gywlxb.20230694
WANG Xiaomeng, GAO Yang. Atomic Force Microscope Based Indentation Techniques and Their Applications[J]. Chinese Journal of High Pressure Physics, 2023, 37(6): 060103. doi: 10.11858/gywlxb.20230694
Citation: WANG Xiaomeng, GAO Yang. Atomic Force Microscope Based Indentation Techniques and Their Applications[J]. Chinese Journal of High Pressure Physics, 2023, 37(6): 060103. doi: 10.11858/gywlxb.20230694

基于原子力显微镜的压痕技术及其应用

doi: 10.11858/gywlxb.20230694
基金项目: 国家自然科学基金(12102386,12192211)
详细信息
    作者简介:

    王晓萌(1999-),男,硕士研究生,主要从事二维材料力学性质研究. E-mail:22124005@zju.edu.cn

    通讯作者:

    高 扬(1989-),男,博士,研究员,主要从事微纳米力学及二维材料研究. E-mail:ygao96@zju.edu.cn

  • 中图分类号: O521.3; O521.2

Atomic Force Microscope Based Indentation Techniques and Their Applications

  • 摘要: 基于原子力显微镜的压痕技术具有高分辨、高精度等优点,是表征材料力学性质的重要手段,在材料科学、纳米科学、生物力学等领域具有广泛应用。首先,介绍了原子力显微镜及相关压痕技术的基本工作原理;然后,回顾总结了基于原子力显微镜的压痕技术在低维材料、软材料等领域的应用;接着,简要综述了原子力显微镜技术在二维材料高压相变方面的最新研究进展,着重介绍基于原子力显微镜的新型埃压痕技术,该技术可施加亚纳米级压痕深度,有效表征与调控二维材料的层间耦合作用;最后,对基于原子力显微镜的压痕技术在未来的发展和应用进行了展望。

     

  • 图  基于AFM的压痕技术的应用

    Figure  1.  Applications of indentation techniques based on AFM

    图  AFM和压痕技术

    Figure  2.  AFM and indentation techniques

    图  二维材料示意图[1213]

    Figure  3.  Schematic of 2D materials[1213]

    图  悬空二维材料的纳米压痕实验[3, 46, 48]

    Figure  4.  Nanoindentation experiment of suspended two-dimensional materials[3, 46, 48]

    图  悬空金属薄膜的纳米压痕实验[11]

    Figure  5.  Nanoindentation experiment of suspended metal nanosheets[11]

    图  埃压痕实验装置、弹性力学模型以及实验结果[59]

    Figure  6.  Å-indentation experimental set-up, elastic mechanics model and experimental results[59]

    图  氧化石墨烯的层间力学性质[60]

    Figure  7.  Interlayer elasticity of graphene oxide[60]

    图  双层石墨烯-单层金刚石相变[7172]

    Figure  8.  Bilayer graphene-monolayer diamond phase transition[7172]

    图  六方氮化硼-金刚石氮化硼相变[81]

    Figure  9.  Hexagonal-to-diamond phase transition of boron nitride[81]

    图  10  生物材料的纳米压痕实验[9294]

    Figure  10.  AFM-based indentation on biomaterials[9294]

    表  1  基于悬空纳米压痕技术获得的部分常见二维材料的力学性能

    Table  1.   Mechanical properties of some typical 2D materials by suspended nanoindentation

    MaterialsElastic modulus/GPaStrength/GPa
    Monolayer graphene[3]1000±100130
    Monolayer boron nitride[45]865±7370.5±5.5
    Monolayer MoS2[43]270±10023
    Multilayer MoS2[46]210–370
    Monolayer WSe2[56]258.6±38.338.0±6.0
    Multilayer WSe2[55]167.3±6.712.4
    Monolayer WS2[56]302.4±24.147.0±8.6
    Monolayer WTe2[56]149.1±9.46.4±3.3
    Multilayer black phosphorous[54]276±32.425
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出版历程
  • 收稿日期:  2023-07-20
  • 修回日期:  2023-09-04
  • 网络出版日期:  2023-11-20
  • 刊出日期:  2023-12-15

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